주요기능

  넓은 시야와 선명한 이미지

  견고한 73.5mm 작업 거리

  대형 XY 스트로크 및 긴 Z 스트로크

  높은 반복성을 가진 자동 초점

  레이저 AF (옵션)

  다양한 조명

  지능형 검색

  디지털 차트 대조

  확장 1.5x 고배율


사양

ModelVMZ-R 3020VMZ-R 4540VMZ-R 6555
XYZ strokes
Type 1, 2, 3 and 4300x200x200mm450x400x200mm650x550x200mm
Type TZ with the main objective lens300x200x200mm450x400x200mm650x550x200mm
Type TZ with the main objective lens
250x200x200mm400x400x200mm600x550x200mm
Type A300x200x200mm450x400x200mm650x550x200mm
Minimum reading unit0.1 micrometer
Maximum weight of specimen20kg40kg50kg
Uncertainty (L : Length in mm)
EUX, MPE EUY, MPE1.2+4L/1000µm

XUXY, MPE2+4L/1000µm

Z axis uncertainty (with Laser AF)1.2+5L/1000µm

CameraBlack & white 1/3" CCD, 1/3" CCD (Option)*
*Color camera option is available only with Type 1, 2 and A
Working distance of objective lens
Type 1, 2 and 350mm with 37 degree oblique, 36mm with 55 degree oblique angle, 10mm with 78 degree oblique angle
Type 430mm
Type TZ11mm with the main objective lens and 32mm with the left objecive lens.
Type A73.5mm without Laser AF, 63mm with Laser AF
Magnification and FOV
Type 10.5 ~ 7.5x / 9.33x7 ~ 0.622x0.467mm
Type 21 ~ 15x / 4.67x3.5 ~ 0.311x0.233mm
Type 32 ~ 30x / 2.33x1.75 ~ 0.155x0.117mm
Type 44 ~ 60x / 1.165x0.875 ~ 0.07x0.068mm
Type TZ1 ~ 120x / 4.67x3.5 ~ 0.039x0.029mm
Type A0.35 ~ 3.5x / 13.3x10 ~ 1.33x1mm
AutofocusType 1, 2, 3, 4 and TZ are equipped with TTL Laser AF and image AF.
Type A is equipped with image AF as standard and with Lase AF as an option
Illuminators
Type 1, 2 and 3LED episcopic and diascopic illuminators
8 segment LED inner and outer ring illuminators (37 degree oblique angle with inner ring and 55 and 78 degree oblique angles with outer ring)
Type TZLED episcopic illuminator and LED Dark Field illuminator for the main and left objective lenses
LED diascopic illuminator for the main objective lens
Type ALED episcopic and diascopic illuminators
8 segment LED ring illuminator with 18 degree oblique angle
RequirementsAC 100-240V ± 10% 50 or 60 Hz
Consumption of currency5A - 2.5A
Dimensions and weight
Main body and table700x730x1795mm /
approx. 245kg
1000x1340x1820mm /approx. 500kg
1200x1640x1820mm /approx. 665kg
Controller190x450x440mm / 15kg
Footprint including a pc on table2100x1100mm2300x1700mm2400x2000mm

주요기능

  Nikon 독점 컨포컬 기술(공초점 기술) 로 동시 광역 높이 측정

  15배 브라이트 필드(명시야) 줌 광학을 이용한 2D 측정

  반도체 제조에서 300mm 웨이퍼 측정과 완벽 호환

  컨포컬 NEXIV 는 웨이퍼 레벨 CSP와 같은 고급 IC 패키지에 있는 다양한 범프 높이 측정 뿐만 아니라

MEMS 와 프로브 카드의 매우 복잡한 구조의 검사에도 최적으로 사용할 수 있습니다.


사양

Objectives
Magnification
3x
7.5x
15x
30x
W.D.
24mm
5mm
20mm
5mm
Confocal optics (Area height measurement)
Maximum scan height
1mm
Field of view
4 x 3mm
1.6 x 1.2mm
0.8 x 0.6mm
0.4 x 0.3mm
Height measurement repeatability (2σ)
0.35μm
0.25μm
0.25μm
0.20μm
Height measurement resolution
0.01μm



Brightfield optics (2D measurement)
Zooming method
Motorized 5-step zoom
Field of view
4 x 3mm to 0.27 x 0.2mm
1.6 x 1.2mm to 0.11 x 0.08mm
1.26 x 0.95mm to 0.1 x 0.074mm
0.63 x 0.47mm to 0.05 x 0.04mm
Illumination
White LED diascopic and episcopic illuminator for all types,
White LED ring light for type 3x and 7.5x
Auto focus
Vision AF nd TTL lase AF (Scan Mode available)
Main body
Stroke (X. Y, Z)
300 x 400 x 150mm
Guaranteed loading capacity
20kg
Maximum permissible error MPEE1X
1.5 + 2.5L/1000µm
Maximum permissible error MPEE1Y
2.5 + 2.5L/1000µm
Maximum permissible error of Z axis MPEE1Z
1 + L/1000µm
Main unit weight
850kg
Power source/power consumption
AC 100 to 240 V ± 10% 50/60 Hz / 13A to 6.5A
Operating condition
Temperature : 20℃ ± 0.5K, Humidity : 70% or less
Acquired standard
CE marking (low voltage/EMC/laser)
Footprint
2500 x 1600mm

주요기능

  Nikon 독점 컨포컬 기술(공초점 기술) 로 동시 광역 높이 측정

  15배 브라이트 필드(명시야) 줌 광학을 이용한 2D 측정

  반도체 제조에서 300mm 웨이퍼 측정과 완벽 호환

  컨포컬 NEXIV 는 웨이퍼 레벨 CSP와 같은 고급 IC 패키지에 있는 다양한 범프 높이 측정 뿐만 아니라

MEMS 와 프로브 카드의 매우 복잡한 구조의 검사에도 최적으로 사용할 수 있습니다.


사양

Objectives
Magnification
3x
7.5x
15x
30x
W.D.
24mm
5mm
20mm
5mm
Confocal optics (Area height measurement)
Field of view
4 x 3mm
1.6 x 1.2mm
0.8 x 0.6mm
0.4 x 0.3mm
Height measurement repeatability (2σ)
0.35μm
0.25μm
0.25μm
0.20μm
Height measurement resolution
0.01μm



Brightfield optics (2D measurement)
Zooming method
Motorized 5-step zoom
Field of view
4 x 3mm to
0.27 x 0.2mm
1.6 x 1.2mm to 0.11 x 0.08mm
1.26 x 0.95mm to 0.1 x 0.074mm
0.63 x 0.47mm to 0.05 x 0.04mm
Illumination
White LED diascopic and episcopic illuminator for all types,
White LED ring light for type 3x and 7.5x
Auto focus
Vision AF nd TTL lase AF (Scan Mode available)
Main body
Stroke (X. Y, Z)
300 x 400 x 150mm
Guaranteed loading capacity
30kg
Maximum permissible error MPEE1X
1.5 + 2.5L / 1000μm
Maximum permissible error MPEE1Y
2.5 + 2.5L / 1000μm
Maximum permissible error of Z axis MPEE1Z
1 + L / 1000μm
Main unit weight
830kg
Power source/power consumption
AC 100 to 240 V ± 10% 50/60 Hz / 13A to 6.5A
Operating condition
Temperature : 20℃ ± 0.5K, Humidity : 70% or less
Acquired standard
CE marking (low voltage/EMC/laser)
Footprint
2500 x 1900mm

KM TRADING CO., LTD.

경상남도 양산시 물금읍 범구6길 10 1층 (범어리 2721-10) ㅣ Tel : 055-383-2717, 070-4738-0098 ㅣ Fax : 055-387-2718 ㅣE-mail : kmt@kmtrading.co.kr

안산 전시장 : 경기도 안산시 단원구 이삭3길 48 (고잔동) ㅣ Tel : 031-414-2717 ㅣ Fax : 031-414-2718  ㅣ E-mail : kmt@kmtrading.co.kr


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