Nexiv

Nikon

Model	VMZ-R 3020	VMZ-R 4540	VMZ-R 6555
XYZ strokes
Type 1, 2, 3 and 4	300x200x200mm	450x400x200mm	650x550x200mm
Type TZ with the main objective lens	300x200x200mm	450x400x200mm	650x550x200mm
Type TZ with the main objective lens	250x200x200mm	400x400x200mm	600x550x200mm
Type A	300x200x200mm	450x400x200mm	650x550x200mm
Minimum reading unit	0.1 micrometer
Maximum weight of specimen	20kg	40kg	50kg
Uncertainty (L : Length in mm)
EUX, MPE EUY, MPE	1.2+4L/1000µm
XUXY, MPE	2+4L/1000µm
Z axis uncertainty (with Laser AF)	1.2+5L/1000µm
Camera	Black & white 1/3" CCD, 1/3" CCD (Option)* *Color camera option is available only with Type 1, 2 and A
Working distance of objective lens
Type 1, 2 and 3	50mm with 37 degree oblique, 36mm with 55 degree oblique angle, 10mm with 78 degree oblique angle
Type 4	30mm
Type TZ	11mm with the main objective lens and 32mm with the left objecive lens.
Type A	73.5mm without Laser AF, 63mm with Laser AF
Magnification and FOV
Type 1	0.5 ~ 7.5x / 9.33x7 ~ 0.622x0.467mm
Type 2	1 ~ 15x / 4.67x3.5 ~ 0.311x0.233mm
Type 3	2 ~ 30x / 2.33x1.75 ~ 0.155x0.117mm
Type 4	4 ~ 60x / 1.165x0.875 ~ 0.07x0.068mm
Type TZ	1 ~ 120x / 4.67x3.5 ~ 0.039x0.029mm
Type A	0.35 ~ 3.5x / 13.3x10 ~ 1.33x1mm
Autofocus	Type 1, 2, 3, 4 and TZ are equipped with TTL Laser AF and image AF. Type A is equipped with image AF as standard and with Lase AF as an option
Illuminators
Type 1, 2 and 3	LED episcopic and diascopic illuminators 8 segment LED inner and outer ring illuminators (37 degree oblique angle with inner ring and 55 and 78 degree oblique angles with outer ring)
Type TZ	LED episcopic illuminator and LED Dark Field illuminator for the main and left objective lenses LED diascopic illuminator for the main objective lens
Type A	LED episcopic and diascopic illuminators 8 segment LED ring illuminator with 18 degree oblique angle
Requirements	AC 100-240V ± 10% 50 or 60 Hz
Consumption of currency	5A - 2.5A
Dimensions and weight
Main body and table	700x730x1795mm / approx. 245kg	1000x1340x1820mm /approx. 500kg	1200x1640x1820mm /approx. 665kg
Controller	190x450x440mm / 15kg
Footprint including a pc on table	2100x1100mm	2300x1700mm	2400x2000mm

Objectives
Magnification	3x	7.5x	15x	30x
W.D.	24mm	5mm	20mm	5mm
Confocal optics (Area height measurement)
Maximum scan height	1mm
Field of view	4 x 3mm	1.6 x 1.2mm	0.8 x 0.6mm	0.4 x 0.3mm
Height measurement repeatability (2σ)	0.35μm	0.25μm	0.25μm	0.20μm
Height measurement resolution	0.01μm
Brightfield optics (2D measurement)
Zooming method	Motorized 5-step zoom
Field of view	4 x 3mm to 0.27 x 0.2mm	1.6 x 1.2mm to 0.11 x 0.08mm	1.26 x 0.95mm to 0.1 x 0.074mm	0.63 x 0.47mm to 0.05 x 0.04mm
Illumination	White LED diascopic and episcopic illuminator for all types, White LED ring light for type 3x and 7.5x
Auto focus	Vision AF nd TTL lase AF (Scan Mode available)
Main body
Stroke (X. Y, Z)	300 x 400 x 150mm
Guaranteed loading capacity	20kg
Maximum permissible error MPE_E1X	1.5 + 2.5L/1000µm
Maximum permissible error MPE_E1Y	2.5 + 2.5L/1000µm
Maximum permissible error of Z axis MPE_E1Z	1 + L/1000µm
Main unit weight	850kg
Power source/power consumption	AC 100 to 240 V ± 10% 50/60 Hz / 13A to 6.5A
Operating condition	Temperature : 20℃ ± 0.5K, Humidity : 70% or less
Acquired standard	CE marking (low voltage/EMC/laser)
Footprint	2500 x 1600mm

Objectives
Magnification	3x	7.5x	15x	30x
W.D.	24mm	5mm	20mm	5mm
Confocal optics (Area height measurement)
Field of view	4 x 3mm	1.6 x 1.2mm	0.8 x 0.6mm	0.4 x 0.3mm
Height measurement repeatability (2σ)	0.35μm	0.25μm	0.25μm	0.20μm
Height measurement resolution	0.01μm
Brightfield optics (2D measurement)
Zooming method	Motorized 5-step zoom
Field of view	4 x 3mm to 0.27 x 0.2mm	1.6 x 1.2mm to 0.11 x 0.08mm	1.26 x 0.95mm to 0.1 x 0.074mm	0.63 x 0.47mm to 0.05 x 0.04mm
Illumination	White LED diascopic and episcopic illuminator for all types, White LED ring light for type 3x and 7.5x
Auto focus	Vision AF nd TTL lase AF (Scan Mode available)
Main body
Stroke (X. Y, Z)	300 x 400 x 150mm
Guaranteed loading capacity	30kg
Maximum permissible error MPE_E1X	1.5 + 2.5L / 1000μm
Maximum permissible error MPE_E1Y	2.5 + 2.5L / 1000μm
Maximum permissible error of Z axis MPE_E1Z	1 + L / 1000μm
Main unit weight	830kg
Power source/power consumption	AC 100 to 240 V ± 10% 50/60 Hz / 13A to 6.5A
Operating condition	Temperature : 20℃ ± 0.5K, Humidity : 70% or less
Acquired standard	CE marking (low voltage/EMC/laser)
Footprint	2500 x 1900mm